Semiconductor package, method for forming semiconductor package, and method for forming semiconductor assembly

ABSTRACT

A semiconductor package includes a first package component include a first side, a second side opposite to the first side, and a plurality of recessed corners over the first side. The semiconductor package further includes a plurality of first stress buffer structures disposed at the recessed corners, and each of the first stress buffer structures has a curved surface. The semiconductor package further includes a second package component connected to the first package component and a plurality of connectors disposed between the first package component and the second package component. The connectors are electrically coupled the first package component and the second package component. The semiconductor package further includes an underfill material between the first package component and the second package component, and at least a portion of the curved surface of the first stress buffer structures is in contact with and embedded in the underfill material.

BACKGROUND

A significant trend throughout integrated circuit (IC) development isthe downsizing of IC components. These integration improvements aretwo-dimensional (2D) in nature where the ICs are integrated on a surfaceof a semiconductor wafer. Although dramatic improvement in lithographyhas enabled greater results in 2D IC formation, there are physicallimits to the density that can be achieved in two dimensions. Also, whenmore devices are put into one chip, more complex designs and more costsare required.

In an attempt to further increased circuit density, three-dimension (3D)ICs have been developed. For example, two dies are boned together; andelectrical connections are constructed between each die. The stackeddies are then bonded to a carrier substrate by using wire bonds and/orconductive pads. In another example, a chip on chip-on-substrate(Co(CoS)) or chip-on wafer on substrate (CoWoS) technique is developed.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 shows a flow chart representing a method for forming asemiconductor assembly according to aspects of the present disclosure.

FIG. 2 shows a flow chart representing a method for forming asemiconductor package according to aspects of the present disclosure.

FIGS. 3A through 7C illustrate a semiconductor assembly at variousfabrication stages constructed according to aspects of the presentdisclosure in one or more embodiments.

FIGS. 8 through 9 illustrate a semiconductor package at variousfabrication stages constructed according to aspects of the presentdisclosure in one or more embodiments.

FIGS. 10 through 12 illustrate a semiconductor package at variousfabrication stages constructed according to aspects of the presentdisclosure in one or more embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper”, “on” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

As used herein, the terms such as “first”, “second” and “third” describevarious elements, components, regions, layers and/or sections, theseelements, components, regions, layers and/or sections should not belimited by these terms. These terms may be only used to distinguish oneelement, component, region, layer or section from another. The termssuch as “first”, “second” and “third” when used herein do not imply asequence or order unless clearly indicated by the context.

As used herein, the terms “approximately,” “substantially,”“substantial” and “about” are used to describe and account for smallvariations. When used in conjunction with an event or circumstance, theterms can refer to instances in which the event or circumstance occursprecisely as well as instances in which the event or circumstance occursto a close approximation. For example, when used in conjunction with anumerical value, the terms can refer to a range of variation of lessthan or equal to ±10% of that numerical value, such as less than orequal to ±5%, less than or equal to ±4%, less than or equal to ±3%, lessthan or equal to ±2%, less than or equal to ±1%, less than or equal to±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. Forexample, two numerical values can be deemed to be “substantially” thesame or equal if a difference between the values is less than or equalto ±10% of an average of the values, such as less than or equal to ±5%,less than or equal to ±4%, less than or equal to ±3%, less than or equalto ±2%, less than or equal to ±1%, less than or equal to ±0.5%, lessthan or equal to ±0.1%, or less than or equal to ±0.05%. For example,“substantially” parallel can refer to a range of angular variationrelative to 0° that is less than or equal to ±10°, such as less than orequal to ±5°, less than or equal to ±4°, less than or equal to ±3°, lessthan or equal to ±2°, less than or equal to ±1°, less than or equal to±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°. Forexample, “substantially” perpendicular can refer to a range of angularvariation relative to 90° that is less than or equal to ±10°, such asless than or equal to ±5°, less than or equal to ±4°, less than or equalto ±3°, less than or equal to ±2°, less than or equal to ±1°, less thanor equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to±0.05°.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3DIC devices. The testing structures may include, forexample, test pads formed in a redistribution layer or on a substratethat allows the testing of the 3D packaging or 3DIC, the use of probesand/or probe cards, and the like. The verification testing may beperformed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good dies to increase the yield and decreasecosts.

A current common requirement for an advanced electronic circuit is theuse of multiple integrated circuit devices (“dies”) integrated in asingle packaged component. As such, the configuration of a 3D package isdeveloped as; for example, CoCoS or CoWoS techniques. The integratedcircuit dies with different functions are mounted to a wafer by usingconductive bumps, such as micro bumps. A thermal reflow step isperformed to complete the mechanical and electrical connection betweenthe dies and the wafer by melting and reflowing the conductive bumps. Inaddition, the integrated circuit dies are coupled with conductive bumpsat the opposite side of the wafer by through substrate vias. Theconductive bumps at the opposite side of the wafer are larger than theconductive bumps between the IC dies and the wafer. Usually, thoseconductive bumps are referred to “ball grid array” or controlledcollapse chip connection (C4) bumps. After the IC dies are mounted tothe wafer and the C4 bumps are prepared, a singulation operation isperformed on the wafer to form pieces of interposers stacked with the ICdies. During the singulation operation, the interposers are diced asrectangular shapes with edges and corners. Later, the interposers aremounted on a circuit board by using the C4 bumps. The IC dies thus areable to receive and transmit signals from outer devices by thechip-on-wafer-on-substrate package.

However, since there is a thermal mismatch between the interposer andthe circuit board, it is found that the interposer may suffer crackscaused by the physical stress due to coefficients of thermal expansion(CTEs) mismatch and warpage mismatch. It is further observed that thecorners and/or edges where the interposer contacting the underfillmaterial acts as crack initial points. Sometimes, the underfill materialimmediately adjacent to the corners/edges also suffers from the stress,thus causing an underfill delamination from the crack initial points.

The present disclosure provides a semiconductor package, a method forforming a semiconductor package, and a method for forming asemiconductor assembly to protect the semiconductor package from crackissue during thermal cycling and/or reliability stressing.

FIG. 1 is a flow chart representing a method for forming a semiconductorassembly 10 according to aspects of the present disclosure. The methodfor forming the semiconductor assembly 10 includes an operation 102,providing a substrate including a plurality of scribe line regions. Themethod for forming the semiconductor assembly 10 further includes anoperation 104, forming a plurality of grooves in the scribe lineregions. The grooves are intersected to form a plurality of intersectionregions. The method for forming the semiconductor assembly 10 furtherincludes an operation 106, disposing a plurality of first stress bufferstructures in the intersection regions. A diameter of one of the firststress buffer structures is greater than a width of the grooves. Themethod for forming the semiconductor assembly 10 further includes anoperation 108, cutting along the grooves after disposing the firststress buffer structures. The method for forming the semiconductorassembly 10 will be further described according to one or moreembodiments. It should be noted that the operations of the method forforming the semiconductor assembly 10 may be rearranged or otherwisemodified within the scope of the various aspects. It is further notedthat additional processes may be provided before, during, and after themethod 10, and that some other processes may only be briefly describedherein. Thus other implementations are possible within the scope of thevarious aspects described herein.

FIG. 2 is a flow chart representing a method for forming a semiconductorpackage 11 according to aspects of the present disclosure. In someembodiments of the present disclosure, the method for forming thesemiconductor package 11 can be performed after the method for formingthe semiconductor assembly 10, but not limited to this. The method forforming the semiconductor package 11 includes an operation 110,providing a first package component including a first side and a secondside opposite to the first side. The first package component includes aplurality of recessed corners on the first side and a plurality of firstrecess buffer structures disposed at the recessed corners. The methodfor forming the semiconductor package 11 further includes an operation112, bonding the first package component to a second package componentwith the first side facing the second package component. The method forforming the semiconductor package 11 further includes an operation 114,forming an underfill material between the first package component andthe second package component. At least a portion of the first stressbuffer structures is in contact with and embedded in the underfillmaterial. The method for forming the semiconductor package 11 will befurther described according to one or more embodiments. It should benoted that the operations of the method for forming the semiconductorpackage 11 may be rearranged or otherwise modified within the scope ofthe various aspects. It is further noted that additional processes maybe provided before, during, and after the method 11, and that some otherprocesses may only be briefly described herein. Thus otherimplementations are possible within the scope of the various aspectsdescribed herein.

FIG. 3A through FIG. 7C are drawings illustrating a semiconductorassembly at various fabrication stages constructed according to aspectsof the present disclosure in one or more embodiments. FIG. 3A is a planview and FIG. 3B is a cross-sectional view along A-A′ line of FIG. 3A.Referring to FIGS. 3A and 3B, a substrate 202 is provided according tooperation 102. In some embodiments of the present disclosure, thesubstrate 202 is a semiconductor wafer including a plurality of scribeline regions 204 and a plurality of chip regions 206 defined by thescribe line regions 204. In some embodiments, the chip regions 206 arearranged in an array separated from each other by the intersectingscribe line regions 204. In some embodiments, a width of the scribe lineregions 204 can between substantially 100 micrometers (μm) andsubstantially 500 μm, but not limited to this. In accordance with someembodiments of the present disclosure, structure formed on the chipregions 206 are described in detail below.

Please refer to FIG. 3B. In some embodiments, the substrate 202 includesa semiconductor material such as silicon (Si), germanium (Ge), diamond,or the like. In other embodiments, the substrate 202 can includecompound materials such as SiGe, silicon carbide (SiC), gallium arsenic(GaAs), indium arsenide (InAs), indium phosphide (InP), silicongermanium carbide SiGeC, gallium indium phosphide (GaInP), combinationof these, or the like. Additionally, the substrate 202 can be asilicon-on-insulator (SOI) substrate. The substrate 202 may includeactive and passive devices (not shown). As one of ordinary skilled inthe art will recognize, a wide variety of devices such as transistors,capacitors, resistors, combination of these, and the like may be used toform the structural and functional requirements of the design for one ormore dies. The devices may be formed using any suitable methods. In someembodiments of the present disclosure, the substrate 202 is aninterposer that generally includes no active devices therein, althoughthe interposer may include passive devices.

Referring to FIG. 3B, semiconductor operations are performed to thesemiconductor wafer to form through-substrate vias (TSVs) 210 in thesubstrate 202, an interconnect structure 212 over a surface 202 b of thesubstrate 202, and a plurality of connectors 214 over the surface 202 bof the substrate 202. As shown in FIG. 3B, the TSVs 210 are conductivevias extending from the surface 202 b of the substrate 202 into a depthof the substrate 202. In some embodiments, the TSVs 210 include a metalvia, and a barrier layer lining the sidewalls of the metal via. Themetal via may be formed of copper (Cu), copper alloy, tungsten (W),tungsten alloy, or the like. The barrier layer (not shown) functions asa diffusion barrier and may be formed of refractory metals, refractorymetal-nitride, refractory metal silicon-nitrides, and combinationthereof. For example but not limited to, tantalum (Ta), tantalum nitride(TaN), titanium (Ti), titanium nitride (TiN), titanium silicon nitride(TiSiN), tungsten nitride (WN), or combination thereof may be used. Insome embodiments, an insulating layer 216 is formed between the TSVs 210and the substrate 202 so as to isolate the TSVs 210 from otherconnections formed in the substrate 202.

The interconnect structure 212, sometimes referred to as redistributionlayer (RDL), is formed over the surface 202 b of the substrate 202, andis electrically coupled to the TSVs 210 and electrical circuitry formedin the substrate 202. The interconnect structure 212 include a pluralityof dielectric layers, conductive lines, and vias. The dielectric layersmay include silicon oxide (SiO), silicon nitride (SiN), silicon carbide(SiC), silicon oxynitride (SiON), low-k dielectric materials such asborophosphosilicate glass (BPSG), fused silica glass (FSG), siliconoxycarbide (SiOC), spin-on-polymers, silicon carbon material, compoundthereof, compositions thereof, combinations thereof, or the like. Theconductive lines are formed in the dielectric layers, and the conductivelines formed in one same dielectric layer are in combination referred toas a conductive layer. The vias are formed between and to electricallycouple the conductive lines of different conductive layers. Theconductive lines and the vias may include Cu, W, aluminum (Al),combination thereof, or the like.

The connectors 214 are formed over and electrically coupled to theinterconnect structures 212. The connectors 214 may be solder balls,metal pillars, micro bumps, electroless nickel-electrolesspalladium-immersion gold technique (ENEPIG) formed bumps, or the like.The connectors 214 may include conductive material(s) such as solder,Cu, Al, gold (Au), nickel (Ni), silver (Ag), palladium (Pd), tin (Sn),combination thereof, or the like.

Still referring to FIG. 3B, at least one or more semiconductor devices220 can be formed over the surface 202 b of the substrate 202. In someembodiments of the present disclosure, the semiconductor devices 220 canbe dies 220, and the dies 220 are bonded to the chip regions 206 of thesubstrate 202. The dies 220 may include a logic die, such as a centralprocessing unit (CPU), a graphics processing unit (GPU), a combinationof these, or the like. The dies 220 may include a memory die, such as aDRAM die, a SRAM die, a combination of these, or the like. In someembodiments, the dies 220 may include an input/output (I/O) die, such asa wide I/O die. In some embodiments, the dies 220 bonded to thesubstrate 202 can be the same type of dies. For example but not limitedto, the dies 220 bonded to the substrate 202 as shown in FIG. 3B can beall DRAM dies. Still in some embodiments, the dies 220 bonded to thesubstrate 202 can be different types of dies. For example but notlimited to, the dies 220 bonded to the substrate 202 as shown in FIG. 3Bcan be logic die(s) and memory die(s). In some embodiments of thepresent disclosure, the dies 220 include a die stack (not shown) whichmay include both logic and memory dies. Any suitable combination ofsemiconductor dies and any number of semiconductor dies may bealternatively adopted, and all such numbers, combinations, andfunctionalities are fully intended to be included within the scope ofthe present disclosure.

In some embodiments of the present disclosure, the semiconductor devices220 are bonded to the substrate 202 through, for example but not limitedto, flip-chip bonding, in which connectors 222 of the semiconductordevices 220 are bonded to the connectors 214 of the substrate 202. Asshown in FIG. 3B, underfill materials 224 are then dispensed into thespace between the semiconductor devices 220 and the substrate 202 and tosurround the connectors 222/214. The underfill materials 224 mayinclude, for example but not limited to, a liquid epoxy, deformable gel,silicon rubber, or the like. And then the underfill materials 224 arecured to harden to reduce damage to and to protect the connectors222/214. Next, a molding compound 226 is molded on the semiconductordevices 220. In some embodiments, the molding compound 226 includes apolymer, an epoxy, SiO filler material, a combination thereof, or thelike. In some embodiments, the semiconductor devices 220 are buried inthe molding compound 226, and a planarization operation can be performedafter curing the molding compound 226. The planarization operation isperformed to provide a substantially planar top surface and expose topsurfaces of the semiconductor devices 220, as shown in FIG. 3B.

Still referring to FIG. 3B, a plurality of connectors 230 is disposed ineach chip region 206. The connectors 230 are disposed on a surface 202 aopposite to the surface 202 b. In some embodiments of the presentdisclosure, a thinning operation is performed to thin down the substrate202 from the surface 202 a until the TSVs 210 are exposed. And adielectric layer 232 can be formed over the surface 202 a of thesubstrate 202. Next, the connectors 230 are formed over the dielectriclayer 232 and electrically coupled to the TSVs 210, as shown in FIG. 3B.The connectors 230 can be solder balls, metal pillars, C4 bumps, microbumps, ENEPIG formed bumps, or the like. The connectors 230 may includesolder, Cu, Al, Au, Ni, Ag, Pd, Sn, combination thereof, or the like.

FIG. 4A is a bottom view of the substrate 202, over which the connectors230 are formed and arranged in an array in each chip region 206 at thesurface 202 a. As mentioned above, the chip regions 206 are separatedfrom each other by the intersecting scribe line regions 204. In someembodiments of the present disclosure, a plurality of grooves 240 isformed in the scribe line regions 204 according to operation 104. Thegrooves 240 can be formed over the surface 202 a in a continuous manneron the scribe line regions 204, such that the planar layout of thegrooves 240 is substantially similar to that of the scribe line regions204. Accordingly, the grooves 240 are intersected to form a plurality ofintersection regions 242. In some embodiments, since the neighboringchip regions 206 are separated by the grooves 240 on the scribe lineregions 204, the intersection regions 242 are adjacent to four cornersof four different chip regions 206, as shown in FIG. 4A. In someembodiments, the grooves 240 can be formed in a discontinuous manner,however the grooves 240 are still intersected to form the intersectionregions 242. In some embodiments of the present disclosure, the grooves240 can be formed by using laser cutting, laser micro jet cutting, bevelcutting, blade sawing, or the like. In some embodiments, when bevelcutting is employed, the grooves 240 may include slanted sidewalls asshown in FIG. 4B, which is an enlarged view of the groove 240. In someembodiments, when a 2-step cutting is employed, the grooves 240 mayinclude vertical sidewalls as shown in FIG. 4C, which is an enlargedview of the groove 240. In still some embodiments, the grooves 240 mayinclude curved sidewalls. Additionally, the sidewalls of the grooves 240may have smooth or rough surfaces depending on the cutting methodemployed to form the grooves 240.

Referring to FIGS. 5A-5C, a plurality of first stress buffer structures250 is formed in the intersection regions 242 over the surface 202 aaccording to operation 106. In other words, each first stress bufferstructure 250 is accommodated in each intersection region 242. In someembodiments of the present disclosure, the first stress bufferstructures 250 can be formed by disposing a plurality of polymermaterials over the intersection regions 242. As shown in FIGS. 5A-5C,the intersection regions 242 of the grooves are filled with the polymermaterials. Furthermore, the polymer materials may overflow theintersection regions 242. Thus, a diameter D of one of the first stressbuffer structures 250 is greater than a width W of the grooves 240 aftercuring the polymer materials to form the first stress buffer structures250 as shown in FIGS. 5A-5C. And the first stress buffer structures 250may have a curved surface, respectively. In some embodiments, the firststress buffer structures 250 can include epoxy-based materials withoutfillers. In some embodiments, the first stress buffer structures 250 caninclude fillers in the epoxy-based materials. As shown in FIG. 5A, thefirst stress buffer structures 250 are spaced apart from the connectors230. Furthermore, the first stress buffer structures 250 are spacedapart from each other, as shown in FIG. 5A.

Referring to FIG. 6, after disposing the first stress buffer structures250, the substrate 202 is cut along the grooves 240 from the surface 202a according to operation 108. Accordingly, the chip regions 206 of thesubstrate 202 are diced into a plurality of semiconductor assembly 200,such as interposer chips. In some embodiments of the present disclosure,sine the individual semiconductor assemblies 200 include the die(s) 220bonded to the interposer substrate 202, the semiconductor assemblies 200can be referred to as die-on-interposer package components. In someembodiments, each of the first stress buffer structures 250 is cut intofour portions remaining at the four corners of the substrate 202.

Referring to FIGS. 7A-7C, the individual semiconductor assembly 200includes a first side 200 a and a second side 200 b (shown in FIG. 8)opposite to the first side 200 a. More importantly, the semiconductorassembly 200 includes a plurality of recessed corners 202C on the firstside 202 a. Each of the recessed corners 202C is a part of theintersection region 242. The semiconductor assembly 200 further includesthe plurality of first stress buffer structures 250 disposed at therecessed corners 202C. As shown in FIGS. 7B-7C, the first stress bufferstructures 250 respectively have a curved surface 250 c. Additionally,each of the first stress buffer structures 250 includes two verticalsidewalls 250 s substantially align to corner sidewalls 202 s of thesemiconductor assembly 200, as shown in FIGS. 7B-7C.

FIGS. 8-9 are drawings illustrating a semiconductor package at variousfabrication stages constructed according to aspects of the presentdisclosure in one or more embodiments. Referring to FIG. 8, a firstpackage component is provided according to operation 110. The firstpackage component can be the semiconductor assembly 200 formed byperforming the abovementioned operations 102-108, but not limited tothis. It should be understood that the TSVs 210, the interconnectionstructure 212, the connectors 214/222, and the underfill materials 224are all omitted in the interest of brevity, and only one semiconductordevice 220 is shown in FIG. 8, but those skilled in the art would easilyrealize the formation and locations of those elements and any otherrequired elements according to the aforementioned description. The firstpackage component 200 includes the first side 200 a and the second side200 b opposite to the second side. More importantly, the first packagecomponent 200 includes the recessed corners 202C and the plurality offirst stress buffer structures 250 disposed at the recessed corners202C. In some embodiments of the present disclosure, a second packagecomponent 260 is provided. The second package component 260 can be anorganic substrate, a circuit board, a dielectric substrate, or asemiconductor substrate with high-density interconnects. In someembodiments, the substrate of the second package component 260 can beprinted circuit board (PCB) made of fiber-glass or similar material andincluding electrical wires printed onto the board for connecting variouscomponents and packages. The second package component 260 can include aplurality of connectors 262 formed over the substrate. The connectors262 can include Cu, Cu alloy, Sn, Sn alloy, Au, Ni, Pd, combinationthereof, or the like. Referring to FIG. 8, the first package component200 is bonded to the second package component 260 with the first side200 a facing the second package component 260 according to operation112. Such that the second package component 260 is electrically coupledto the first package component 200 through the connectors 230 and theconnectors 262. In some embodiments of the present disclosure, since theheight of the first stress buffer structures 250 is less than the heightof the connectors 230, the first stress buffer structures 250 are spacedapart from the second package component 260 as shown in FIG. 8.

Referring to FIG. 9, an underfill material 264 is formed between thefirst package component 200 and the second package component 260according to operation 114. Accordingly, a semiconductor package 270 isobtained. The underfill material 264 may include, for example but notlimited to, a liquid epoxy, deformable gel, silicon rubber, or the like,that is dispensed between the first package component 200 and the secondpackage component 260 and then cured to harden. In some embodiments ofthe present disclosure, the underfill material 264 includes fillers. Theunderfill material 264 is used to reduce damage to and to protect theelectrical connectors 230/262. In some embodiments, at least a portionof the first stress buffer structures 250 is in contact with andembedded in the underfill material 264. It can be understood that whenthe first stress buffer structures 250 includes no fillers while theunderfill material 264 includes the fillers, at least a portion of thecurved surface of the first stress buffer structures 250 is in contactwith and embedded in the underfill material 264. It can be understoodthat when both of the first stress buffer structures 250 and theunderfill material 264 include the fillers, the first stress bufferstructures 250 and the underfill material 264 are taken as a continuousstructures including merged two portions. And it can be referred thatsuch continuous structures between the first package component 200 andthe second package component 260 covers the recessed corners 202C of thefirst package component 200.

It is found that a thermal mismatch and/or warpage mismatch between thesubstrate 202 and the second component package 260 may generate, andthus the semiconductor package 270 may suffer physical stress duringthermal cycling and/or reliability stressing. Furthermore, it is furtherobserved that the corners often act as crack initial points. Byproviding the first stress buffer structures 250 at the recessed corners202C of the first package component 200, the stress is buffered, thecrack initial point is eliminated, and thus the crack and delaminationissues are mitigated.

Please refer to FIGS. 10-12, which are schematic drawings illustrating asemiconductor package at various fabrication stages constructedaccording to aspects of the present disclosure in one or moreembodiments. It should be understood that similar features in FIGS. 3A-9and 10-12 are identified by the same reference numerals for clarity andsimplicity. Furthermore, similar elements in FIGS. 3A-9 and 10-12 caninclude similar materials, and thus those details are omitted in theinterest of brevity. In some embodiments of the present disclosure, asemiconductor assembly or a first semiconductor package 200′ can beprovided according to the method for forming the semiconductor assembly10. The first semiconductor component 200′ can be similar as theabovementioned first semiconductor component 200, and thus only thedifference is detailed. Referring to FIG. 10, which is a bottom view ofa substrate 202 provided according to operation 102. The substrate 202can include a plurality of scribe line regions and a plurality of chipregions 206 defined by the scribe line regions. Semiconductor operationscan be performed to the semiconductor wafer to form TSVs (not shown) inthe substrate 202, an interconnect structure (not shown) over a surfaceof the substrate 202, and a plurality of connectors (not shown) over thesurface of the substrate 202. At least one or more semiconductor devices220 such as dies can be formed over the surface of the substrate 202.And any suitable combination of semiconductor dies and any number ofsemiconductor dies may be alternatively adopted, and all such numbers,combinations, and functionalities are fully intended to be includedwithin the scope of the present disclosure. As mentioned above, thesemiconductor devices 220 are bonded to the substrate 202 through theconnectors. Underfill materials (not shown) can be dispensed into thespace between the dies 220 and the substrate 202 and to surround theconnectors. A molding compound 226 (shown in FIG. 12) is molded on thesemiconductor devices 220 and followed by, in some embodiments,performing a planarization operation to provide a substantially planartop surface and expose top surface of the semiconductor devices 220.

Referring to FIG. 10, a plurality of connectors 230 is disposed in eachchip region 206. The connectors 230 are disposed on a surface 202 aopposite to the dies 220, and electrically coupled to the TSVs. In someembodiments of the present disclosure, a plurality of grooves 240 isformed in the scribe line regions according to operation 104 as shown bythe dotted line in FIG. 10. The grooves 240 can be formed in acontinuous manner on the scribe line region, such that the planar layoutof the grooves 240 is substantially similar to that of the scribe lineregion. Accordingly, the grooves 240 are intersected to form a pluralityof intersection regions 242 as shown in FIG. 10. In some embodiments,since the neighboring chip regions 206 are separated by the grooves 240on the scribe line regions, the intersection regions 242 are adjacent tofour corners of four different chip regions 206, as shown in FIG. 10.

Still referring to FIG. 10, a plurality of first stress bufferstructures 250 is formed in the intersection regions 242 over thesurface 202 a according to operation 106. In some embodiments of thepresent disclosure, a plurality of second stress buffer structures 252is formed in the grooves 240 over the surface 202 a simultaneously. Insome embodiments of the present disclosure, the first stress bufferstructures 250 and the second stress buffer structures 252 can be formedby disposing a plurality of polymer materials over the grooves 240 andthe intersection regions 242. As shown in FIG. 10, the grooves 240 andthe intersection regions 242 are filled with the polymer materials.Furthermore, the polymer materials may overflow the grooves 240 and theintersection regions 242. Thus, a diameter D of one of the first stressbuffer structures 250 and a width of the second stress structures 252are greater than a width W of the grooves 240 after curing the polymermaterials as shown in FIG. 10. And the first stress buffer structures250 and the second stress structures 252 may have a curved surface,respectively. In some embodiments, the first stress buffer structures250 can include epoxy-based materials without fillers. In someembodiments, the first stress buffer structures 250 can include fillersin the epoxy-based materials. As shown in FIG. 10, the first stressbuffer structures 250 and the second buffer stress structures 252 arespaced apart from the connectors 230. Furthermore, each of the secondstress buffer structures 252 contacts and connects two adjacent firststress buffer structures 250. In other words, the first stress bufferstructures 250 and the second buffer structures 252 are connected toeach other form a stress buffer frame, as shown in FIG. 10.

Referring to FIG. 11, after disposing the first stress buffer structures250 and the second stress buffer structures 252, the substrate 202 iscut along the grooves 240 from the surface 202 a according to operation108. Accordingly, the chip regions 206 of the substrate 202 are dicedinto a plurality of semiconductor assemblies 200′, such as interposerchips. In some embodiments of the present disclosure, sine theindividual semiconductor assemblies 200′ include the die(s) 220 bondedto the interposer substrate 202, the semiconductor assemblies 200′ canbe referred to as die-on-interposer package components. In someembodiments, each of the first stress buffer structures 250 is cut intofour portions remaining on the four corners of the substrate 202. Eachof the second stress buffer structures 252 is cut into two portionsremaining on the four edges of the substrate 202.

A cross-sectional view of the semiconductor assemblies 200′ is shown inFIG. 12. Referring to FIG. 12, the semiconductor assembly 200′ includesthe first side 202 a and the second side 202 b. More importantly, thesemiconductor assembly 200′ includes a plurality of recessed corners202C over the first side 202 a and a plurality of recessed edges 202Eover the first side 202 a. Each of the recessed corners 202C is a partof the intersection region 242, and each of the recessed edges is a partof the groove 240. The dotted line near the connectors 230 represents asurface of the substrate 202 and openings of the recessed corners 202Cand the recessed edges 202E. The dotted line near the die 220 representsbottoms of the recessed corners 202C and the recessed edges 202E. Theslanted dotted lines connecting the above mentioned two dotted linesrepresent sidewalls of the recessed corners 202C and the recessed edges202E. The semiconductor assembly 200′ further includes the plurality offirst stress buffer structures 250 disposed at the recessed corners 202Cand the plurality of second stress buffer structures 252 disposed overthe recessed edges 202E. The first stress buffer structures 250respectively have a curved surface. Additionally, each of the firststress buffer structures includes two vertical sidewalls substantiallyalign to corner sidewalls of the semiconductor assembly 200′. The secondstress buffer structures 252 respectively have a curved surface.Additionally, each of the second stress buffer structures 252 includes avertical sidewall substantially align to an edge sidewall of thesemiconductor assembly 200′ as shown in FIG. 12.

Referring to FIG. 12, in some embodiments of the present disclosure, afirst package component such as the semiconductor assembly 200′ isprovided according to operation 110, and the first package component200′ is bonded to a second package component 260 with the first side 200a facing the second package component 260 according to operation 112.Such that second package component 260 is electrically coupled to thefirst package component 200′ through the connectors 230 and connectors262. In some embodiments of the present disclosure, since heights of thefirst stress buffer structures 250 and the second stress bufferstructures 252 are less than the height of the connectors 230, the firststress buffer structures 250 and the second stress buffer structures 252all are spaced apart from the second package component 260 as shown inFIG. 12.

Still referring to FIG. 12, an underfill material 264 is formed betweenthe first package component 200′ and the second package component 260according to operation 114. Accordingly, a semiconductor package 270′ isobtained. In some embodiments, at least a portion of the first stressbuffer structures 250 and at least a portion of the second stress bufferstructures 252 are in contact with and embedded in the underfillmaterial 264. It can be understood that when the first stress bufferstructures 250 includes no fillers, a portion of the curved surface ofthe first stress buffer structures 250 and a portion of the curvedsurface of the second stress buffer structures 252 are in contact withand embedded in the underfill material 264.

It will be appreciated that in the forgoing method, the first stressbuffer structures are formed in the intersection regions of the grooves.In other words, the first stress buffer structures are formed at therecessed corners of the semiconductor assembly or the firstsemiconductor package component. As mentioned above, the corners oftenact as crack initial points, therefore by providing the first stressbuffer structures at the recessed corners of the first packagecomponent, the stress is buffered, the crack initial point iseliminated, and thus the crack and delamination issues are mitigated.

According to one embodiment of the present disclosure, a method forforming a semiconductor assembly is provided. The method includesproviding a substrate including a plurality of scribe line regions;forming a plurality of grooves in the scribe line regions, wherein thegrooves are intersected to form a plurality of intersection regions;disposing a plurality of first stress buffer structures in theintersection regions, wherein a diameter of one of the first stressbuffer structures is greater than a width of the grooves; and cuttingalong the grooves after disposing the first stress buffer structures.

According to another embodiment, a method for forming a semiconductorpackage is provided. The method includes providing a first packagecomponent comprising a first side and a second side opposite to thefirst side, wherein the first package component comprises a plurality ofrecessed corners on the first side and a plurality of first stressbuffer structures disposed at the recessed corners; bonding the firstpackage component to a second package component with the first sidefacing the second package component; and forming an underfill materialbetween the first package component and the second package component,wherein at least a portion of the first stress buffer structures is incontact with and embedded in the underfill material.

According to one embodiment of the present disclosure, a semiconductorpackage is provided. The semiconductor package includes a first packagecomponent including a first side, a second side opposite to the firstside, and a plurality of recessed corners over the first side; aplurality of first stress buffer structures disposed at the recessedcorners, wherein each of the first stress buffer structures has a curvedsurface; a second package component connected to the first side of thefirst package component; a plurality of connectors disposed between thefirst package component and the second package component, and theconnectors electrically coupling the first package component and thesecond package component; and an underfill material between the firstpackage component and the second package component, wherein at least aportion of the curved surface of the first stress buffer structures isin contact with and embedded in the underfill material.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. A method for forming a semiconductor assembly, comprising; providinga substrate comprising a plurality of scribe line regions; forming aplurality of grooves in the scribe line regions, wherein the grooves areintersected to form a plurality of intersection regions; disposing aplurality of first stress buffer structures in the intersection regions,wherein a diameter of one of the first stress buffer structures isgreater than a width of the grooves; and cutting along the grooves afterdisposing the first stress buffer structures.
 2. The method of claim 1,wherein the substrate comprises a plurality of chip regions defined bythe scribe line regions.
 3. The method of claim 2, further comprisingdisposing a plurality of connectors in each chip region before disposingthe first stress buffer structures.
 4. The method of claim 3, whereinthe first stress buffer structures are spaced apart from the connectors.5. The method of claim 1, wherein the disposing the first stress bufferstructures further comprises: disposing a plurality of polymer materialsover the intersection regions; and curing the polymer materials to formthe first stress buffer structures.
 6. The method of claim 1, whereinthe first stress buffer structures comprise epoxy-based materials. 7.The method of claim 6, wherein the first stress buffer structurescomprise fillers in the epoxy-based materials.
 8. The method of claim 1,further comprising disposing a plurality of second stress bufferstructures in the grooves simultaneously with disposing the first stressbuffer structures, and the second stress buffer structures contact thefirst stress buffer structures.
 9. The method of claim 8, wherein awidth of the second stress buffer structures is greater than the widthof the grooves.
 10. A method for forming a semiconductor package,comprising: providing a first package component comprising a first sideand a second side opposite to the first side, wherein the first packagecomponent comprises a plurality of recessed corners on the first sideand a plurality of first stress buffer structures disposed at therecessed corners; bonding the first package component to a secondpackage component with the first side facing the second packagecomponent; and forming an underfill material between the first packagecomponent and the second package component, wherein at least a portionof the first stress buffer structures is in contact with and embedded inthe underfill material.
 11. The method of claim 10, wherein theproviding the first package component further comprises: providing aninterposer comprising a first surface and a second surface opposite tothe first surface; forming a plurality of grooves over the first surfaceof the interposer, wherein the grooves are intersected to form aplurality of intersection regions; disposing a plurality of first stressbuffer structures in the intersection regions, wherein a diameter of thefirst stress buffer structure is greater than a width of the grooves;and cutting along the grooves to obtain the first package component andto form the recessed corners over the first surface of the interposer,wherein each of the recessed corners of the first package component is apart of the intersection region.
 12. The method of claim 11, wherein thefirst package component further comprises: a semiconductor devicedisposed over the second surface of the interposer; a molding compounddisposed over the second surface of the interposer; and a plurality ofconnectors disposed over the first surface of the interposer.
 13. Themethod of claim 11, further comprising: forming a plurality of recessededges on the first surface of the interposer simultaneously with formingthe recessed corners; and disposing a plurality of second stress bufferstructures over the recessed edges simultaneously with disposing thefirst stress buffer structures, wherein the second stress bufferstructures contact the first stress buffer structures, and a width ofthe second stress buffer structure is greater larger than the width ofthe grooves.
 14. The method of claim 10, wherein each of the firstbuffer stress structures has at least a curved surface, and at least aportion of the curved surface is in contact with and embedded in theunderfill material.
 15. The method of claim 10, wherein the first stressbuffer structures comprise an epoxy-based material.
 16. The method ofclaim 15, wherein the first stress buffer structures comprise fillers inthe epoxy-based material.
 17. (canceled)
 18. (canceled)
 19. (canceled)20. (canceled)
 21. A method for forming a semiconductor assembly,comprising; receiving a semiconductor wafer comprising a plurality ofchip regions and scribe line regions spacing apart individual chipregions; forming a plurality of grooves in the scribe line regions,wherein the grooves are intersected to form a plurality of intersectionregions; disposing a plurality of first stress buffer structures at theintersection regions, wherein a diameter of one of the first stressbuffer structures is greater than a width of the grooves; and cuttingthrough one of the first stress buffer structures by cutting along thegrooves.
 22. The method of claim 21, further comprising disposing aplurality of connectors in one of the chip regions before forming aplurality of grooves in the scribe line regions.
 23. The method of claim21, further comprising disposing a plurality of second stress bufferstructures in the grooves simultaneously with disposing the first stressbuffer structures, and the second stress buffer structures contact thefirst stress buffer structures.
 24. The method of claim 21, whereinforming the plurality of grooves in the scribe line regions comprises abevel cutting operation.